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Title: Large area, surface discharge pumped, vacuum ultraviolet light source

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source is disclosed. A contamination-free VUV light source having a 225 cm{sup 2} emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm{sup 2} at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing. 3 figs.
Inventors:
;
Issue Date:
OSTI Identifier:
415764
Assignee:
Univ. of California, Alameda, CA (United States) PTO; SCA: 360601; 426000; PA: EDB-97:015374; SN: 97001714605
Patent Number(s):
US 5,585,641/A/
Application Number:
PAN: 8-448,242
Contract Number:
W-7405-ENG-36
Resource Relation:
Other Information: PBD: 17 Dec 1996
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; LIGHT SOURCES; DESIGN; SEMICONDUCTOR MATERIALS; MANUFACTURING; DISPLAY DEVICES; FAR ULTRAVIOLET RADIATION; INDUSTRIAL PLANTS

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