Large area, surface discharge pumped, vacuum ultraviolet light source

Sze, R C; Quigley, G P

Title: Large area, surface discharge pumped, vacuum ultraviolet light source

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Abstract

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source is disclosed. A contamination-free VUV light source having a 225 cm{sup 2} emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm{sup 2} at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing. 3 figs.

Inventors:: Sze, R C; Quigley, G P

Issue Date:: 1996-12-17

Research Org.:: Univ. of California (United States)

OSTI Identifier:: 415764

Patent Number(s):: 5585641

Application Number:: PAN: 8-448,242

Assignee:: Univ. of California, Alameda, CA (United States)

DOE Contract Number:: W-7405-ENG-36

Resource Type:: Patent

Resource Relation:: Other Information: PBD: 17 Dec 1996

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; LIGHT SOURCES; DESIGN; SEMICONDUCTOR MATERIALS; MANUFACTURING; DISPLAY DEVICES; FAR ULTRAVIOLET RADIATION; INDUSTRIAL PLANTS

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                    Sze, R C, and Quigley, G P. Large area, surface discharge pumped, vacuum ultraviolet light source.  United States: N. p., 1996. 
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                    Sze, R C, & Quigley, G P. Large area, surface discharge pumped, vacuum ultraviolet light source.  United States.

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                    Sze, R C, and Quigley, G P. Tue .  
        "Large area, surface discharge pumped, vacuum ultraviolet light source".  United States.

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@article{osti_415764,

  title        = {Large area, surface discharge pumped, vacuum ultraviolet light source},

  author       = {Sze, R C and Quigley, G P},

  abstractNote = {Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source is disclosed. A contamination-free VUV light source having a 225 cm{sup 2} emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm{sup 2} at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing. 3 figs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1996},

  month        = {12}

}

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