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Title: Josephson junction

Abstract

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

Inventors:
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Sunnyvale, CA
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
869862
Patent Number(s):
5411937
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
josephson; junction; novel; method; fabricating; nanometer; geometry; electronic; devices; described; junctions; accurately; reproducibly; manufactured; employing; photolithographic; direct; write; electron; beam; lithography; techniques; combination; aqueous; etchants; particular; manufacturing; planar; temperature; superconducting; material; josephson junction; josephson junctions; conducting material; electron beam; superconducting material; electronic devices; novel method; temperature superconducting; electronic device; beam lithography; direct write; /505/216/

Citation Formats

Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Josephson junction. United States: N. p., 1995. Web.
Wendt, Joel R, Plut, Thomas A, & Martens, Jon S. Josephson junction. United States.
Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Sun . "Josephson junction". United States. https://www.osti.gov/servlets/purl/869862.
@article{osti_869862,
title = {Josephson junction},
author = {Wendt, Joel R and Plut, Thomas A and Martens, Jon S},
abstractNote = {A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Patent:

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