Josephson junction

Wendt, Joel R; Plut, Thomas A; Martens, Jon S

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Title: Josephson junction

Abstract

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

Inventors:

Wendt, Joel R ^[1]; Plut, Thomas A ^[1]; Martens, Jon S ^[2]

Albuquerque, NM
Sunnyvale, CA

Issue Date:: 1995-01-01

Research Org.:: AT&T

OSTI Identifier:: 869862

Patent Number(s):: 5411937

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S505/702 - Josephson junction present
Y10S505/728 - Etching

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DOE Contract Number:: AC04-76DP00789

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: josephson; junction; novel; method; fabricating; nanometer; geometry; electronic; devices; described; junctions; accurately; reproducibly; manufactured; employing; photolithographic; direct; write; electron; beam; lithography; techniques; combination; aqueous; etchants; particular; manufacturing; planar; temperature; superconducting; material; josephson junction; josephson junctions; conducting material; electron beam; superconducting material; electronic devices; novel method; temperature superconducting; electronic device; beam lithography; direct write; /505/216/

Citation Formats


                    Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Josephson junction.  United States: N. p., 1995. 
        Web.

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                    Wendt, Joel R, Plut, Thomas A, & Martens, Jon S. Josephson junction.  United States.

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                    Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Sun .  
        "Josephson junction".  United States.  https://www.osti.gov/servlets/purl/869862.

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@article{osti_869862,

  title        = {Josephson junction},

  author       = {Wendt, Joel R and Plut, Thomas A and Martens, Jon S},

  abstractNote = {A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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Works referenced in this record:

Substrate step‐edge YBa ₂ Cu ₃ O ₇ rf SQUIDs
journal, February 1991

Daly, K. P.; Dozier, W. D.; Burch, J. F.
Applied Physics Letters, Vol. 58, Issue 5
https://doi.org/10.1063/1.104581

Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions
journal, March 1993

Bao, Z.; Ji, L.; Lin, K. Y.
IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1
https://doi.org/10.1109/77.233943

Millimeter wave responses of YBCO variable-thickness bridges
journal, March 1993

Park, C. H.; Kobayashi, T.; Goto, T.
IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1
https://doi.org/10.1109/77.233416

Bi‐epitaxial grain boundary junctions in YBa ₂ Cu ₃ O ₇
journal, August 1991

Char, K.; Colclough, M. S.; Garrison, S. M.
Applied Physics Letters, Vol. 59, Issue 6
https://doi.org/10.1063/1.105355

Measurement of conduction properties of highly resistive superconducting microbridges
journal, March 1993

Chen, X.; Yoshikawa, N.; Sugahara, M.
IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1
https://doi.org/10.1109/77.233567

High temperature superconducting Josephson transmission lines for pulse and step sharpening
journal, December 1992

Martens, J. S.; Wendt, J. R.; Hietala, V. M.
Journal of Applied Physics, Vol. 72, Issue 12
https://doi.org/10.1063/1.351906

Improved aqueous etchant for high T _c superconductor materials
journal, April 1992

Ashby, Carol I. H.; Martens, Jon; Plut, Thomas A.
Applied Physics Letters, Vol. 60, Issue 17
https://doi.org/10.1063/1.107065

YBa ₂ Cu ₃ O ₇ nanobridges fabricated by direct‐write electron beam lithography
journal, September 1992

Wendt, J. R.; Martens, J. S.; Ashby, C. I. H.
Applied Physics Letters, Vol. 61, Issue 13
https://doi.org/10.1063/1.107508

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Similar Records

Title: Josephson junction

Abstract

Citation Formats

Substrate step‐edge YBa 2 Cu 3 O 7 rf SQUIDs journal, February 1991

Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions journal, March 1993

Millimeter wave responses of YBCO variable-thickness bridges journal, March 1993

Bi‐epitaxial grain boundary junctions in YBa 2 Cu 3 O 7 journal, August 1991

Measurement of conduction properties of highly resistive superconducting microbridges journal, March 1993

High temperature superconducting Josephson transmission lines for pulse and step sharpening journal, December 1992

Improved aqueous etchant for high T c superconductor materials journal, April 1992

YBa 2 Cu 3 O 7 nanobridges fabricated by direct‐write electron beam lithography journal, September 1992

Substrate step‐edge YBa ₂ Cu ₃ O ₇ rf SQUIDs
journal, February 1991

Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions
journal, March 1993

Millimeter wave responses of YBCO variable-thickness bridges
journal, March 1993

Bi‐epitaxial grain boundary junctions in YBa ₂ Cu ₃ O ₇
journal, August 1991

Measurement of conduction properties of highly resistive superconducting microbridges
journal, March 1993

High temperature superconducting Josephson transmission lines for pulse and step sharpening
journal, December 1992

Improved aqueous etchant for high T _c superconductor materials
journal, April 1992

YBa ₂ Cu ₃ O ₇ nanobridges fabricated by direct‐write electron beam lithography
journal, September 1992