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Title: Josephson junction

Abstract

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.

Inventors:
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Sunnyvale, CA
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
869862
Patent Number(s):
5411937
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
josephson; junction; novel; method; fabricating; nanometer; geometry; electronic; devices; described; junctions; accurately; reproducibly; manufactured; employing; photolithographic; direct; write; electron; beam; lithography; techniques; combination; aqueous; etchants; particular; manufacturing; planar; temperature; superconducting; material; josephson junction; josephson junctions; conducting material; electron beam; superconducting material; electronic devices; novel method; temperature superconducting; electronic device; beam lithography; direct write; /505/216/

Citation Formats

Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Josephson junction. United States: N. p., 1995. Web.
Wendt, Joel R, Plut, Thomas A, & Martens, Jon S. Josephson junction. United States.
Wendt, Joel R, Plut, Thomas A, and Martens, Jon S. Sun . "Josephson junction". United States. https://www.osti.gov/servlets/purl/869862.
@article{osti_869862,
title = {Josephson junction},
author = {Wendt, Joel R and Plut, Thomas A and Martens, Jon S},
abstractNote = {A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Works referenced in this record:

Substrate step‐edge YBa 2 Cu 3 O 7 rf SQUIDs
journal, February 1991


Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions
journal, March 1993


Millimeter wave responses of YBCO variable-thickness bridges
journal, March 1993


Bi‐epitaxial grain boundary junctions in YBa 2 Cu 3 O 7
journal, August 1991


Orientation Dependence of Grain-Boundary Critical Currents in Y Ba 2 Cu 3 O 7 δ Bicrystals
journal, July 1988


Measurement of conduction properties of highly resistive superconducting microbridges
journal, March 1993


High temperature superconducting Josephson transmission lines for pulse and step sharpening
journal, December 1992


Improved aqueous etchant for high T c superconductor materials
journal, April 1992


YBa 2 Cu 3 O 7 nanobridges fabricated by direct‐write electron beam lithography
journal, September 1992