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Title: Josephson junction

A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.
Inventors:
 [1];  [1];  [2]
  1. (Albuquerque, NM)
  2. (Sunnyvale, CA)
Issue Date:
OSTI Identifier:
869862
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 5411937
Contract Number:
AC04-76DP00789
Research Org:
AT & T CORP
Country of Publication:
United States
Language:
English
Subject:
josephson; junction; novel; method; fabricating; nanometer; geometry; electronic; devices; described; junctions; accurately; reproducibly; manufactured; employing; photolithographic; direct; write; electron; beam; lithography; techniques; combination; aqueous; etchants; particular; manufacturing; planar; temperature; superconducting; material; josephson junction; josephson junctions; conducting material; electron beam; superconducting material; electronic devices; novel method; temperature superconducting; electronic device; beam lithography; direct write; /505/216/