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Title: Acoustic wave device using plate modes with surface-parallel displacement

Abstract

Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
868315
Patent Number(s):
5117146
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
acoustic; wave; device; plate; modes; surface-parallel; displacement; solid-state; sensors; monitoring; conditions; surface; immersed; liquid; concentrations; species; electrical; properties; formed; placing; interdigital; input; output; transducers; piezoelectric; substrate; propagating; therebetween; deposition; removal; material; respectively; film; contact; changes; mechanical; characteristics; solution; create; perturbations; velocity; attenuation; function; acoustic plate; plate modes; acoustic wave; mechanical properties; electrical properties; electrical characteristics; wave device; piezoelectric substrate; acoustic sensors; plate mode; monitoring electrical; electrical characteristic; acoustic sensor; /310/73/

Citation Formats

Martin, Stephen J, and Ricco, Antonio J. Acoustic wave device using plate modes with surface-parallel displacement. United States: N. p., 1992. Web.
Martin, Stephen J, & Ricco, Antonio J. Acoustic wave device using plate modes with surface-parallel displacement. United States.
Martin, Stephen J, and Ricco, Antonio J. Wed . "Acoustic wave device using plate modes with surface-parallel displacement". United States. https://www.osti.gov/servlets/purl/868315.
@article{osti_868315,
title = {Acoustic wave device using plate modes with surface-parallel displacement},
author = {Martin, Stephen J and Ricco, Antonio J},
abstractNote = {Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {1}
}

Works referenced in this record:

Surface acoustic wave devices as chemical sensors in liquids. Evidence disputing the importance of Rayleigh wave propagation
journal, March 1987


The oscillation frequency of a quartz resonator in contact with liquid
journal, January 1985


Gas detection using surface acoustic wave delay lines
journal, January 1983


Recent Advances in Shallow Bulk Acoustic Wave Devices
conference, January 1979


Microgravimetric immunoassay with piezoelectric crystals
journal, December 1983


A SAW-Chemosensor for NO2Gas-Concentration Measurement
conference, January 1985