(110) Oriented silicon wafer latch accelerometer and process for forming the same
Abstract
A method for etching a (110) silicon wafer to produce latching cantilever beams, which bend parallel to the surface of the wafer. The resulting apparatus is also part of the invention.
- Inventors:
-
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 867230
- Patent Number(s):
- 4891255
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 110; oriented; silicon; wafer; latch; accelerometer; process; forming; method; etching; produce; latching; cantilever; beams; bend; parallel; surface; resulting; apparatus; silicon wafer; /428/73/216/
Citation Formats
Ciarlo, Dino R. (110) Oriented silicon wafer latch accelerometer and process for forming the same. United States: N. p., 1990.
Web.
Ciarlo, Dino R. (110) Oriented silicon wafer latch accelerometer and process for forming the same. United States.
Ciarlo, Dino R. Mon .
"(110) Oriented silicon wafer latch accelerometer and process for forming the same". United States. https://www.osti.gov/servlets/purl/867230.
@article{osti_867230,
title = {(110) Oriented silicon wafer latch accelerometer and process for forming the same},
author = {Ciarlo, Dino R},
abstractNote = {A method for etching a (110) silicon wafer to produce latching cantilever beams, which bend parallel to the surface of the wafer. The resulting apparatus is also part of the invention.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}
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