Production of N[sup +] ions from a multicusp ion beam apparatus
Abstract
A method of generating a high purity (at least 98%) N[sup +] ion beam using a multicusp ion source having a chamber formed by a cylindrical chamber wall surrounded by a plurality of magnets, a filament centrally disposed in said chamber, a plasma electrode having an extraction orifice at one end of the chamber, a magnetic filter having two parallel magnets spaced from said plasma electrode and dividing the chamber into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber, maintaining the chamber wall at a positive voltage relative to the filament and at a magnitude for an optimum percentage of N[sup +] ions in the extracted ion beams, disposing a hot liner within the chamber and near the chamber wall to limit recombination of N[sup +] ions into the N[sub 2][sup +] ions, spacing the magnets of the magnetic filter from each other for optimum percentage of N[sup 3] ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8[times]10[sup [minus]4] torr) for an optimum percentage of N[sup +] ions in the extractedmore »
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6042918
- Patent Number(s):
- 5198677
- Application Number:
- PPN: US 7-774912
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11 Oct 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Ta; NITROGEN IONS; ION SOURCES; BEAM EXTRACTION; CATIONS; ELECTRIC DISCHARGES; ELECTRODES; ION BEAMS; LINERS; MAGNETIC FILTERS; ORIFICES; RECOMBINATION; BEAMS; CHARGED PARTICLES; FILTERS; IONS; OPENINGS; 661220* - Particle Beam Production & Handling; Targets- (1992-)
Citation Formats
Leung, Kango, Kunkel, W B, and Walther, S R. Production of N[sup +] ions from a multicusp ion beam apparatus. United States: N. p., 1993.
Web.
Leung, Kango, Kunkel, W B, & Walther, S R. Production of N[sup +] ions from a multicusp ion beam apparatus. United States.
Leung, Kango, Kunkel, W B, and Walther, S R. Tue .
"Production of N[sup +] ions from a multicusp ion beam apparatus". United States.
@article{osti_6042918,
title = {Production of N[sup +] ions from a multicusp ion beam apparatus},
author = {Leung, Kango and Kunkel, W B and Walther, S R},
abstractNote = {A method of generating a high purity (at least 98%) N[sup +] ion beam using a multicusp ion source having a chamber formed by a cylindrical chamber wall surrounded by a plurality of magnets, a filament centrally disposed in said chamber, a plasma electrode having an extraction orifice at one end of the chamber, a magnetic filter having two parallel magnets spaced from said plasma electrode and dividing the chamber into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber, maintaining the chamber wall at a positive voltage relative to the filament and at a magnitude for an optimum percentage of N[sup +] ions in the extracted ion beams, disposing a hot liner within the chamber and near the chamber wall to limit recombination of N[sup +] ions into the N[sub 2][sup +] ions, spacing the magnets of the magnetic filter from each other for optimum percentage of N[sup 3] ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8[times]10[sup [minus]4] torr) for an optimum percentage of N[sup +] ions in the extracted ion beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 30 00:00:00 EST 1993},
month = {Tue Mar 30 00:00:00 EST 1993}
}