Production of atomic or molecular nitrogen ion beams using a multicusp and a microwave ion source

Journal Article · Wed Jun 15 04:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.340302· OSTI ID:5189763

Walther, S R; Leung, K N; Kunkel, W B

Two small ion sources have been used to generate positive nitrogen ion beams. One is a multicusp ion source, the other is a compact microwave ion source which needs no magnetic field for operation. Both sources are operated with and without a magnetic filter to control the energetic electron population near the extraction region. Results for both ion sources, including current densities and ionic species mix are presented. The multicusp ion source can produce beams of nitrogen ions with greater than 90% of the ion species either N/sup +/ or N/sup +//sub 2/ with current densities of approx.8 and 2.5 mA/cm/sup 2/, respectively. The microwave ion source can generate nitrogen ion beams composed of more than 85% N/sup +//sub 2/ with current densities of approx.30 mA/cm/sup 2/.

• Research Organization: Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5189763
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 63:12; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM CURRENTS
BEAM PRODUCTION
BEAMS
CHARGED PARTICLES
CURRENT DENSITY
CURRENTS
DATA
EXPERIMENTAL DATA
FABRICATION
INFORMATION
ION BEAMS
ION SOURCES
IONS
MOLECULAR IONS
NITROGEN 14 BEAMS
NITROGEN IONS
NUMERICAL DATA