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Title: Maskless, reticle-free, lithography

Abstract

A lithography system in which the mask or reticle, which usually carries the pattern to be printed onto a substrate, is replaced by a programmable array of binary (i.e. on/off) light valves or switches which can be programmed to replicate a portion of the pattern each time an illuminating light source is flashed. The pattern of light produced by the programmable array is imaged onto a lithographic substrate which is mounted on a scanning stage as is common in optical lithography. The stage motion and the pattern of light displayed by the programmable array are precisely synchronized with the flashing illumination system so that each flash accurately positions the image of the pattern on the substrate. This is achieved by advancing the pattern held in the programmable array by an amount which corresponds to the travel of the substrate stage each time the light source flashes. In this manner the image is built up of multiple flashes and an isolated defect in the array will only have a small effect on the printed pattern. The method includes projection lithographies using radiation other than optical or ultraviolet light. The programmable array of binary switches would be used to control extreme ultravioletmore » (EUV), x-ray, or electron, illumination systems, obviating the need for stable, defect free masks for projection EUV, x-ray, or electron, lithographies. 7 figs.« less

Inventors:
;
Issue Date:
Research Org.:
University of California
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
563706
Patent Number(s):
5,691,541
Application Number:
PAN: 8-645,531
Assignee:
Univ. of California, Oakland, CA (United States); Ultratech Stepper, Inc., San Jose, CA (United States) PTO; SCA: 426000; PA: EDB-98:015787; SN: 98001896334
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 25 Nov 1997
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; MASKING; MICROELECTRONIC CIRCUITS; DESIGN; EXTREME ULTRAVIOLET RADIATION; X RADIATION; ELECTRON SOURCES; VISIBLE RADIATION; PROGRAMMING

Citation Formats

Ceglio, N.M., and Markle, D.A. Maskless, reticle-free, lithography. United States: N. p., 1997. Web.
Ceglio, N.M., & Markle, D.A. Maskless, reticle-free, lithography. United States.
Ceglio, N.M., and Markle, D.A. Tue . "Maskless, reticle-free, lithography". United States.
@article{osti_563706,
title = {Maskless, reticle-free, lithography},
author = {Ceglio, N.M. and Markle, D.A.},
abstractNote = {A lithography system in which the mask or reticle, which usually carries the pattern to be printed onto a substrate, is replaced by a programmable array of binary (i.e. on/off) light valves or switches which can be programmed to replicate a portion of the pattern each time an illuminating light source is flashed. The pattern of light produced by the programmable array is imaged onto a lithographic substrate which is mounted on a scanning stage as is common in optical lithography. The stage motion and the pattern of light displayed by the programmable array are precisely synchronized with the flashing illumination system so that each flash accurately positions the image of the pattern on the substrate. This is achieved by advancing the pattern held in the programmable array by an amount which corresponds to the travel of the substrate stage each time the light source flashes. In this manner the image is built up of multiple flashes and an isolated defect in the array will only have a small effect on the printed pattern. The method includes projection lithographies using radiation other than optical or ultraviolet light. The programmable array of binary switches would be used to control extreme ultraviolet (EUV), x-ray, or electron, illumination systems, obviating the need for stable, defect free masks for projection EUV, x-ray, or electron, lithographies. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {11}
}