Enhanced microfabrication using electrochemical techniques
Abstract
A method is provided for subtractively processing a layer of etchable material formed over an electrically conductive surface region of a workpiece. The workpiece is immersed in a liquid solution, generally but not exclusively a conductive solution, that comprises an etchant for the etchable material, so that etching of the etchable material is initiated. An electric circuit is connected to include a control electrode, a reference electrode, and the electrically conductive surface region of the workpiece. The electric circuit is used to monitor the development process dynamically at each of a plurality of intervals during the etching. The etching is terminated when the electrochemical signal satisfies a criterion indicating that the etching is complete.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1987026
- Patent Number(s):
- 11549903
- Application Number:
- 16/244,501
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 01/10/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Arrington, Christian, Dagel, Amber Lynn, Pillars, Jamin Ryan, St. John, Christopher, Coleman, Jonathan, Perez, Carlos R., Hollowell, Andrew E., and Baca, Kalin. Enhanced microfabrication using electrochemical techniques. United States: N. p., 2023.
Web.
Arrington, Christian, Dagel, Amber Lynn, Pillars, Jamin Ryan, St. John, Christopher, Coleman, Jonathan, Perez, Carlos R., Hollowell, Andrew E., & Baca, Kalin. Enhanced microfabrication using electrochemical techniques. United States.
Arrington, Christian, Dagel, Amber Lynn, Pillars, Jamin Ryan, St. John, Christopher, Coleman, Jonathan, Perez, Carlos R., Hollowell, Andrew E., and Baca, Kalin. Tue .
"Enhanced microfabrication using electrochemical techniques". United States. https://www.osti.gov/servlets/purl/1987026.
@article{osti_1987026,
title = {Enhanced microfabrication using electrochemical techniques},
author = {Arrington, Christian and Dagel, Amber Lynn and Pillars, Jamin Ryan and St. John, Christopher and Coleman, Jonathan and Perez, Carlos R. and Hollowell, Andrew E. and Baca, Kalin},
abstractNote = {A method is provided for subtractively processing a layer of etchable material formed over an electrically conductive surface region of a workpiece. The workpiece is immersed in a liquid solution, generally but not exclusively a conductive solution, that comprises an etchant for the etchable material, so that etching of the etchable material is initiated. An electric circuit is connected to include a control electrode, a reference electrode, and the electrically conductive surface region of the workpiece. The electric circuit is used to monitor the development process dynamically at each of a plurality of intervals during the etching. The etching is terminated when the electrochemical signal satisfies a criterion indicating that the etching is complete.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {1}
}
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