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Title: Arbitrary electron dose waveforms for electron microscopy

Abstract

A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.

Inventors:
; ; ;
Issue Date:
Research Org.:
Integrated Dynamic Electron Solutions, Inc., Pleasanton, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1986717
Patent Number(s):
11476082
Application Number:
17/688,339
Assignee:
Integrated Dynamic Electron Solutions, Inc. (Pleasanton, CA)
DOE Contract Number:  
SC0013104
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/07/2022
Country of Publication:
United States
Language:
English

Citation Formats

Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy. United States: N. p., 2022. Web.
Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, & Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy. United States.
Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Tue . "Arbitrary electron dose waveforms for electron microscopy". United States. https://www.osti.gov/servlets/purl/1986717.
@article{osti_1986717,
title = {Arbitrary electron dose waveforms for electron microscopy},
author = {Bloom, Ruth Shewmon and Reed, Bryan Walter and Masiel, Daniel Joseph and Park, Sang Tae},
abstractNote = {A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 18 00:00:00 EDT 2022},
month = {Tue Oct 18 00:00:00 EDT 2022}
}

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