Arbitrary electron dose waveforms for electron microscopy
Abstract
A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.
- Inventors:
- Issue Date:
- Research Org.:
- Integrated Dynamic Electron Solutions, Inc., Pleasanton, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1986717
- Patent Number(s):
- 11476082
- Application Number:
- 17/688,339
- Assignee:
- Integrated Dynamic Electron Solutions, Inc. (Pleasanton, CA)
- DOE Contract Number:
- SC0013104
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 03/07/2022
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy. United States: N. p., 2022.
Web.
Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, & Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy. United States.
Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Tue .
"Arbitrary electron dose waveforms for electron microscopy". United States. https://www.osti.gov/servlets/purl/1986717.
@article{osti_1986717,
title = {Arbitrary electron dose waveforms for electron microscopy},
author = {Bloom, Ruth Shewmon and Reed, Bryan Walter and Masiel, Daniel Joseph and Park, Sang Tae},
abstractNote = {A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {10}
}
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