Arbitrary electron dose waveforms for electron microscopy

Bloom, Ruth Shewmon; Reed, Bryan Walter; Masiel, Daniel Joseph; Park, Sang Tae

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Title: Arbitrary electron dose waveforms for electron microscopy

Abstract

A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.

Inventors:: Bloom, Ruth Shewmon; Reed, Bryan Walter; Masiel, Daniel Joseph; Park, Sang Tae

Issue Date:: 2023-08-15

Research Org.:: Integrated Dynamic Electron Solutions, Inc., Pleasanton, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 2222132

Patent Number(s):: 11728128

Application Number:: 17/825,261

Assignee:: Integrated Dynamic Electron Solutions, Inc. (Pleasanton, CA)

DOE Contract Number:: SC0013104

Resource Type:: Patent

Resource Relation:: Patent File Date: 05/26/2022

Country of Publication:: United States

Language:: English

Citation Formats


                    Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy.  United States: N. p., 2023. 
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                    Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, & Park, Sang Tae. Arbitrary electron dose waveforms for electron microscopy.  United States.

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                    Bloom, Ruth Shewmon, Reed, Bryan Walter, Masiel, Daniel Joseph, and Park, Sang Tae. Tue .  
        "Arbitrary electron dose waveforms for electron microscopy".  United States.  https://www.osti.gov/servlets/purl/2222132.

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@article{osti_2222132,

  title        = {Arbitrary electron dose waveforms for electron microscopy},

  author       = {Bloom, Ruth Shewmon and Reed, Bryan Walter and Masiel, Daniel Joseph and Park, Sang Tae},

  abstractNote = {A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2023},

  month        = {8}

}

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