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Title: Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion

Abstract

In a method of printing a transferable component, a stamp including an elastomeric post having three-dimensional relief features protruding from a surface thereof is pressed against a component on a donor substrate with a first pressure that is sufficient to mechanically deform the relief features and a region of the post between the relief features to contact the component over a first contact area. The stamp is retracted from the donor substrate such that the component is adhered to the stamp. The stamp including the component adhered thereto is pressed against a receiving substrate with a second pressure that is less than the first pressure to contact the component over a second contact area that is smaller than the first contact area. The stamp is then retracted from the receiving substrate to delaminate the component from the stamp and print the component onto the receiving substrate. Related apparatus and stamps are also discussed.

Inventors:
; ; ;
Issue Date:
Research Org.:
X Display Co. Technology, Ltd., Dublin (Ireland); Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1735038
Patent Number(s):
10717267
Application Number:
15/195,747
Assignee:
X Display Company Technology Limited (Dublin, IE); The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
B - PERFORMING OPERATIONS B41 - PRINTING B41F - PRINTING MACHINES OR PRESSES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/28/2016
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Menard, Etienne, Rogers, John A., Kim, Seok, and Carlson, Andrew. Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion. United States: N. p., 2020. Web.
Menard, Etienne, Rogers, John A., Kim, Seok, & Carlson, Andrew. Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion. United States.
Menard, Etienne, Rogers, John A., Kim, Seok, and Carlson, Andrew. Tue . "Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion". United States. https://www.osti.gov/servlets/purl/1735038.
@article{osti_1735038,
title = {Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion},
author = {Menard, Etienne and Rogers, John A. and Kim, Seok and Carlson, Andrew},
abstractNote = {In a method of printing a transferable component, a stamp including an elastomeric post having three-dimensional relief features protruding from a surface thereof is pressed against a component on a donor substrate with a first pressure that is sufficient to mechanically deform the relief features and a region of the post between the relief features to contact the component over a first contact area. The stamp is retracted from the donor substrate such that the component is adhered to the stamp. The stamp including the component adhered thereto is pressed against a receiving substrate with a second pressure that is less than the first pressure to contact the component over a second contact area that is smaller than the first contact area. The stamp is then retracted from the receiving substrate to delaminate the component from the stamp and print the component onto the receiving substrate. Related apparatus and stamps are also discussed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {7}
}

Works referenced in this record:

Printing plate for flexographic printing and method of making
patent, June 1990


Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
patent, May 2011


Dry adhesives comprised of micropores and nanopores
patent, September 2015


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2016


OLED display with composite photosensor
patent, October 2007


Structures and Methods for Testing Printable Integrated Circuits
patent-application, August 2013


Display Module and System Applications
patent-application, June 2015


Film Formation Method as Well as Device Manufactured by Employing the Same, and Method of Manufacturing Device
patent-application, April 2004


Methods of making dry adhesives
patent, June 2012


Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
patent-application, August 2009


Method of Forming a Patterned Layer of a Material on a Substrate
patent-application, September 2011


Method for Producing a Stamp for Hot Embossing
patent-application, January 2012


Smart pixel lighting and display microcontroller
patent, April 2017


Methods for fabricating microstructures
patent, January 2016


Methods and devices for fabricating three-dimensional nanoscale structures
patent, April 2010


Microelectronic Packages and Methods Therefor
patent-application, August 2008


Method for Manufacturing a Three-Dimensional Semiconductor Device and a Wafer Used Therein
patent-application, July 2008


Imaging Structure with Embedded Light Sources
patent-application, August 2013


Light emitting unit and display device
patent, April 2014


Methods and devices for fabricating and assembling printable semiconductor elements
patent, July 2011


Imaging system having redundant pixel groupings
patent, June 2004


Methods and devices for fabricating and assembling printable semiconductor elements
patent, November 2009


Mutli-Layer Stamp
patent-application, June 2017


Method and Device for Transferring a Pattern from a Stamp to a Substrate
patent-application, August 2008


Appendage Mountable Electronic Devices COnformable to Surfaces
patent-application, December 2013


Light emitting diode display with redundancy scheme
patent, January 2018


Printable Semiconductor Structures and Related Methods of Making and Assembling
patent-application, February 2007


Light Emitting Device Reflective Bank Structure
patent-application, June 2014


Dry Adhesives and Methods for Making Dry Adhesives
patent-application, January 2010


Direct connect interconnect for testing semiconductor dice and wafers
patent, February 2000


Surface Treatment for Oxidation Removal in Integrated Circuit Package Assemblies
patent-application, February 2006


Colour Active Matrix Displays
patent-application, October 2010


Composite patterning devices for soft lithography
patent-application, October 2005


UV Nanoimprint Lithography Process Using Elementwise Embossed Stamp and Selectively Additive Pressurization
patent-application, September 2004


Non-contact transfer printing
patent, January 2017


Light-Emitting Device and Manufacturing Method Thereof
patent-application, July 2012


Methods and devices for fabricating and assembling printable semiconductor elements
patent, March 2014


Nanoparticle Fabrication Methods, Systems, and Materials
patent-application, July 2011


Apparatus and Methods for Micro-Transfer-Printing
patent-application, July 2017


Electronic parts mounting apparatus
patent, April 1993


Micro assembled hybrid displays and lighting elements
patent, July 2017


Method and Apparatus for Flip-Chip Bonding
patent-application, February 2007


Smart Pixel Lighting and Display Microcontroller
patent-application, July 2017


2D/3D switchable color display apparatus with narrow band emitters
patent, October 2011


Semiconductor Device
patent-application, May 2007


Manufacturing Method of Semiconductor Device
patent-application, July 2010


Non-Contact Transfer Printing
patent-application, February 2013


Apparatus and methods for micro-transfer-printing
patent, June 2016


Stamper for Minute Structure Transfer and a Method for Manufacturing the Same
patent-application, March 2010


Apparatus and Methods for Micro-Transfer-Printing
patent-application, April 2017


Micro-Pattern Transferring Stamper
patent-application, December 2012


Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components
patent-application, May 2008


Method of Manufacturing a Semiconductor Device
patent-application, March 2006


Multilayer Wiring Board and Semiconductor Device
patent-application, May 2011


Method of Fabricating a Light Emitting Diode Display with Integrated Defect Detection Test
patent-application, September 2014


Selective transfer of active components
patent-application, October 2013


Active Matrix Display Device and Thin Film Transistor Display Device
patent-application, November 2004


Processes for Multi-Layer Devices Utilizing Layer Transfer
patent-application, March 2014


Arrays of Ultrathin Silicon Solar Microcells
patent-application, November 2011


Chip Orientation and Attachment Method
patent-application, June 2005


Display device with an array of display drivers recessed onto a substrate
patent, February 2006


Systems and Methods for Controlling Release of Transferable Semiconductor Structures
patent-application, June 2017


Imaging Apparatus and Method for Making Flexographic Printing Masters
patent-application, September 2011


Micro-Transfer Printable Electronic Component
patent-application, September 2017


Stamper for Transferring Fine Pattern and Method for Manufacturing Thereof
patent-application, June 2010


Method for Manufacturing Semiconductor Device
patent-application, March 2006


Printable inorganic semiconductor structures
patent, May 2017


Micro-Electro-Mechanical System (MEMS) Variable Capacitor Apparatuses, Systems and Related Methods
patent-application, September 2004


Methods and devices for fabricating and assembling printable semiconductor elements
patent, May 2013


Semiconductor Device and Manufacturing Method Thereof
patent-application, July 2004


Printable semiconductor structures and related methods of making and assembling
patent, March 2013


LED Display with Wavelength Conversion Layer
patent-application, December 2014


Content-Based Adaptive Refresh Schemes for Low-Power Displays
patent-application, April 2014


Printable inorganic semiconductor method
patent, June 2016


Systems and Methods for Controlling Release of Transferable Semiconductor Structures
patent-application, December 2015


Dynamically Tunable Fibrillar Structures
patent-application, November 2008


Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag
patent, May 2002


Flexible oled display with chiplets
patent, October 2010


OLED Display Driver Circuits and Techniques
patent-application, April 2013


Display Device and Method of Manufacturing the Same
patent-application, October 2002


Resilient Conductive Electrical Interconnect
patent-application, February 2012


Contact Structure and Semiconductor Device
patent-application, March 2010


Biomimetic dry adhesives and methods of production therefor
patent, April 2014


Engineered Substrates for Semiconductor Epitaxy and Methods of Fabricating the Same
patent-application, September 2014


Laser assisted transfer welding process
patent, October 2015


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2018


High-Yield Fabrication of Large-Format Substrates with Distributed, Independent Control Elements
patent-application, September 2012


High aspect ratio adhesive structure and a method of forming the same
patent, February 2015


Semiconductor Wafer Having a Thin Die and Tethers and Methods of Making the Same
patent-application, July 2003


Method to make low resistance contact
patent, April 2014


Pixel circuit, display panel, and driving method thereof
patent, July 2014


Mold Structures, and Method of Transfer of Fine Structures
patent-application, October 2012


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2016


OLED device with embedded chip driving
patent, August 2011


Materials and Processes for Releasing Printable Compound Semiconductor Devices
patent-application, August 2013


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2016


Mold for imprinting and production method thereof
patent-application, December 2012


LED device having improved light output
patent, February 2011


Printing in a medium
patent, October 2008


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2016


Arrays of ultrathin silicon solar microcells
patent, March 2014


Methods for surface attachment of flipped active components
patent-application, May 2015


Composite patterning devices for soft lithography
patent, March 2007


Semiconductor Device, and Process for Manufacturing Semiconductor Device
patent-application, December 2013


Apparatus and Methods for Micro-Transfer-Printing
patent-application, January 2016


Printable semiconductor structures and related methods of making and assembling
patent, September 2010


Decal transfer lithography
patent, February 2010


Pattern Forming Method
patent-application, March 2013


Substrates with transferable chiplets
patent, July 2016


Optical systems fabricated by printing-based assembly
patent, July 2011


OLED display with improved power performance
patent, September 2009


Methods for Surface Attachment of Flipped Active Components
patent-application, December 2012


LED with uniform current spreading and method of fabrication
patent, August 2013


Method for fabricating a semiconductor component based on GaN
patent, April 2010


Printable, flexible and stretchable diamond for thermal management
patent, June 2013


Substrates with transferable chiplets
patent, January 2015


Printable semiconductor structures and related methods of making and assembling
patent, October 2011


Power Electronic Package Having Two Substrates with Multiple Semiconductor Chips and Electronic Components
patent-application, March 2008


Light emitting diode display with redundancy scheme
patent, July 2014


Dry adhesives and methods for making dry adhesives
patent, March 2012


Method of transferring a light emitting diode
patent, August 2014


OLED display with photosensor
patent, August 2005


Glass-based SOI structures
patent, October 2009


SOI Substrate and Method for Manufacturing SOI Substrate
patent-application, November 2010


Method for Producing a Micro-LED Matrix, Micro-LED Matrix and Use of a Micro-LED Matrix
patent-application, April 2014


Stamp with Structured Posts
patent-application, February 2017


Method of Fabricating Imprint Lithography Template
patent-application, June 2008


Apparatus and methods for micro-transfer-printing
patent, January 2017


Dry adhesives and methods for making dry adhesives
patent, September 2013


Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays
patent-application, December 2010


Debondable Adhesive Article
patent-application, December 2010


Method of Mounting Chip onto Printed Circuit Board in Shortened Working Time
patent-application, November 2001


Microcontact printing on surfaces and derivative articles
patent, January 2001


Wafer Level Chip Scale Package with Annular Reinforcement Structure
patent-application, November 2011


Method of manufacturing a display panel
patent, December 2005


Printable Component Structure with Electrical Contact
patent-application, February 2017


OLED display architecture
patent, December 2012


Substrates with Transferable Chiplets
patent-application, June 2015


Microelectronic Packages and Methods Therefor
patent-application, December 2005


Methods for Surface Attachment of Flipped Active Components
patent-application, December 2015


Vertical interconnect for organic electronic devices
patent, August 2007


Method for Producing an Integrated Device and a Device Produced Thereby
patent-application, May 2009


Thermally managed LED arrays assembled by printing
patent, September 2017


Laser Assisted Transfer Welding Process
patent-application, May 2012


Support Structures for Semiconductor Devices
patent-application, April 2007


Redundant imaging systems
patent, October 2006


Method of fabricating a TFT-EL pixel
patent, August 1996


Solid state emissive display with on-demand refresh
patent, August 2001


Self-illuminating imaging device
patent, April 2004


Stretchable semiconductor elements and stretchable electrical circuits
patent-application, February 2006


Deformable stamp for patterning three-dimensional surfaces
patent-application, May 2002


Stretchable and Foldable Electronic Devices
patent-application, July 2010


Compositions of Neutral Layer for Directed Self Assembly Block Copolymers and Processes Thereof
patent-application, March 2013


Method of Preparing Optically Imaged High Performance Photomasks
patent-application, February 2003


Thin-Film Semiconductor Device and Method of Manufacturing the Same
patent-application, September 2005


Nanoimprint Resist, Nanoimprint Mold and Nanoimprint Lithography
patent-application, December 2010


Method for Integrating a Light Emitting Device
patent-application, May 2015


Optical systems fabricated by printing-based assembly
patent, May 2014


Methods for transferring elements from a template to a substrate
patent, April 2003


Reinforced Composite Stamp for Dry Transfer Printing of Semiconductor Elements
patent-application, January 2010


Smart pixel lighting and display microcontroller
patent, October 2015


Substrates with Transferable Chiplets
patent-application, December 2012


TSV Backside Reveal Structure and Exposing Process
patent-application, November 2014


Methods of Forming Printable Integrated Circuit Devices and Devices Formed Thereby
patent-application, September 2010


Stretchable semiconductor elements and stretchable electrical circuits
patent, July 2009