Single crystal micromechanical resonator
Abstract
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1354782
- Patent Number(s):
- 9641154
- Application Number:
- 15/349,593
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Nov 11
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Single crystal micromechanical resonator. United States: N. p., 2017.
Web.
Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, & Van Deusen, Stuart B. Single crystal micromechanical resonator. United States.
Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Tue .
"Single crystal micromechanical resonator". United States. https://www.osti.gov/servlets/purl/1354782.
@article{osti_1354782,
title = {Single crystal micromechanical resonator},
author = {Olsson, Roy H. and Friedmann, Thomas A. and Jensen Homeijer, Sara and Wiwi, Michael and Hattar, Khalid Mikhiel and Clark, Blythe and Bauer, Todd and Van Deusen, Stuart B.},
abstractNote = {A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 02 00:00:00 EDT 2017},
month = {Tue May 02 00:00:00 EDT 2017}
}
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