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Title: Single crystal micromechanical resonator

A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
Inventors:
; ; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1354782
Assignee:
Sandia Corporation SNL-A
Patent Number(s):
9,641,154
Application Number:
15/349,593
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2016 Nov 11
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Other works cited in this record:

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