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Title: Single crystal micromechanical resonator

Abstract

A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1354782
Patent Number(s):
9641154
Application Number:
15/349,593
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Nov 11
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B.. Single crystal micromechanical resonator. United States: N. p., 2017. Web.
Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, & Van Deusen, Stuart B.. Single crystal micromechanical resonator. United States.
Olsson, Roy H., Friedmann, Thomas A., Jensen Homeijer, Sara, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B.. Tue . "Single crystal micromechanical resonator". United States. https://www.osti.gov/servlets/purl/1354782.
@article{osti_1354782,
title = {Single crystal micromechanical resonator},
author = {Olsson, Roy H. and Friedmann, Thomas A. and Jensen Homeijer, Sara and Wiwi, Michael and Hattar, Khalid Mikhiel and Clark, Blythe and Bauer, Todd and Van Deusen, Stuart B.},
abstractNote = {A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {5}
}

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