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Title: Single crystal micromechanical resonator and fabrication methods thereof

Abstract

The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1336915
Patent Number(s):
9,525,398
Application Number:
14/288,236
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 May 27
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Citation Formats

Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Single crystal micromechanical resonator and fabrication methods thereof. United States: N. p., 2016. Web.
Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, & Van Deusen, Stuart B. Single crystal micromechanical resonator and fabrication methods thereof. United States.
Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Tue . "Single crystal micromechanical resonator and fabrication methods thereof". United States. https://www.osti.gov/servlets/purl/1336915.
@article{osti_1336915,
title = {Single crystal micromechanical resonator and fabrication methods thereof},
author = {Olsson, Roy H. and Friedmann, Thomas A. and Homeijer, Sara Jensen and Wiwi, Michael and Hattar, Khalid Mikhiel and Clark, Blythe and Bauer, Todd and Van Deusen, Stuart B.},
abstractNote = {The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {12}
}

Patent:

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