Single crystal micromechanical resonator and fabrication methods thereof
Abstract
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1336915
- Patent Number(s):
- 9525398
- Application Number:
- 14/288,236
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 May 27
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION
Citation Formats
Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Single crystal micromechanical resonator and fabrication methods thereof. United States: N. p., 2016.
Web.
Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, & Van Deusen, Stuart B. Single crystal micromechanical resonator and fabrication methods thereof. United States.
Olsson, Roy H., Friedmann, Thomas A., Homeijer, Sara Jensen, Wiwi, Michael, Hattar, Khalid Mikhiel, Clark, Blythe, Bauer, Todd, and Van Deusen, Stuart B. Tue .
"Single crystal micromechanical resonator and fabrication methods thereof". United States. https://www.osti.gov/servlets/purl/1336915.
@article{osti_1336915,
title = {Single crystal micromechanical resonator and fabrication methods thereof},
author = {Olsson, Roy H. and Friedmann, Thomas A. and Homeijer, Sara Jensen and Wiwi, Michael and Hattar, Khalid Mikhiel and Clark, Blythe and Bauer, Todd and Van Deusen, Stuart B.},
abstractNote = {The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {12}
}
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