Vertically aligned nanostructure scanning probe microscope tips

Guillorn, Michael A.; Ilic, Bojan; Melechko, Anatoli V.; Merkulov, Vladimir I.; Lowndes, Douglas H.; Simpson, Michael L.

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Title: Vertically aligned nanostructure scanning probe microscope tips

Abstract

Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.

Inventors:: Guillorn, Michael A.; Ilic, Bojan; Melechko, Anatoli V.; Merkulov, Vladimir I.; Lowndes, Douglas H.; Simpson, Michael L.

Issue Date:: 2006-12-19

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1176036

Patent Number(s):: 7151256

Application Number:: 10/716,770

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y15/00 - Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
B82Y35/00 - Methods or apparatus for measurement or analysis of nanostructures

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q70/12 - Nanotube tips
G01Q70/16 - Probe manufacture

Show less

DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Guillorn, Michael A., Ilic, Bojan, Melechko, Anatoli V., Merkulov, Vladimir I., Lowndes, Douglas H., and Simpson, Michael L. Vertically aligned nanostructure scanning probe microscope tips.  United States: N. p., 2006. 
        Web.

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                    Guillorn, Michael A., Ilic, Bojan, Melechko, Anatoli V., Merkulov, Vladimir I., Lowndes, Douglas H., & Simpson, Michael L. Vertically aligned nanostructure scanning probe microscope tips.  United States.

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                    Guillorn, Michael A., Ilic, Bojan, Melechko, Anatoli V., Merkulov, Vladimir I., Lowndes, Douglas H., and Simpson, Michael L. Tue .  
        "Vertically aligned nanostructure scanning probe microscope tips".  United States.  https://www.osti.gov/servlets/purl/1176036.

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@article{osti_1176036,

  title        = {Vertically aligned nanostructure scanning probe microscope tips},

  author       = {Guillorn, Michael A. and Ilic, Bojan and Melechko, Anatoli V. and Merkulov, Vladimir I. and Lowndes, Douglas H. and Simpson, Michael L.},

  abstractNote = {Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2006},

  month        = {12}

}

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Works referenced in this record:

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journal, December 2001

Merkulov, Vladimir I.; Melechko, Anatoli V.; Guillorn, Michael A.
Chemical Physics Letters, Vol. 350, Issue 5-6
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Controlled alignment of carbon nanofibers in a large-scale synthesis process
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Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
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Applied Physics Letters, Vol. 80, Issue 12
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Catalytic growth of carbon filaments
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Baker, R. T. K.
Carbon, Vol. 27, Issue 3
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Mechanical properties of high-aspect-ratio atomic-force microscope tips
journal, June 2002

Jänchen, G.; Hoffmann, P.; Kriele, A.
Applied Physics Letters, Vol. 80, Issue 24
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WS2 nanotubes as tips in scanning probe microscopy
journal, December 1999

Rothschild, A.; Cohen, S. R.; Tenne, R.
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Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors
journal, August 2001

Nguyen, Cattien V.; Chao, Kuo-Jen; Stevens, Ramsey M. D.
Nanotechnology, Vol. 12, Issue 3
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Patterned growth of individual and multiple vertically aligned carbon nanofibers
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Merkulov, V. I.; Lowndes, D. H.; Wei, Y. Y.
Applied Physics Letters, Vol. 76, Issue 24
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Guillorn, M. A.; McKnight, T. E.; Melechko, A.
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Improved fabrication approach for carbon nanotube probe devices
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Similar Records

Title: Vertically aligned nanostructure scanning probe microscope tips

Abstract

Citation Formats

Sharpening of carbon nanocone tips during plasma-enhanced chemical vapor growth journal, December 2001

Scanning probe metrology journal, July 1992

Single-wall carbon nanotube atomic force microscope probes journal, March 2002

Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging journal, December 1995

Shaping carbon nanostructures by controlling the synthesis process journal, August 2001

Controlled alignment of carbon nanofibers in a large-scale synthesis process journal, June 2002

Scanning probe tips formed by focused ion beams journal, September 1991

Scanning tunneling microscopy on rough surfaces: Tip‐shape‐limited resolution journal, February 1990

Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy journal, March 2002

Catalytic growth of carbon filaments journal, January 1989

Mechanical properties of high-aspect-ratio atomic-force microscope tips journal, June 2002

WS2 nanotubes as tips in scanning probe microscopy journal, December 1999

Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors journal, August 2001

Patterned growth of individual and multiple vertically aligned carbon nanofibers journal, June 2000

Growth and fabrication with single-walled carbon nanotube probe microscopy tips journal, May 2000

Microfabricated field emission devices using carbon nanofibers as cathode elements journal, January 2001

Individually addressable vertically aligned carbon nanofiber-based electrochemical probes journal, March 2002

Improved fabrication approach for carbon nanotube probe devices journal, November 2000

Self-aligned gated field emission devices using single carbon nanofiber cathodes journal, November 2002

Scanning probe tip geometry optimized for metrology by focused ion beam ion milling journal, November 1991

Characterization of scanning probe microscope tips for linewidth measurement journal, November 1991

Formation of probe microscope tips in silicon by focused ion beams journal, January 1994

Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid journal, June 1999

Sharpening of carbon nanocone tips during plasma-enhanced chemical vapor growth
journal, December 2001

Scanning probe metrology
journal, July 1992

Single-wall carbon nanotube atomic force microscope probes
journal, March 2002

Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging
journal, December 1995

Shaping carbon nanostructures by controlling the synthesis process
journal, August 2001

Controlled alignment of carbon nanofibers in a large-scale synthesis process
journal, June 2002

Scanning probe tips formed by focused ion beams
journal, September 1991

Scanning tunneling microscopy on rough surfaces: Tip‐shape‐limited resolution
journal, February 1990

Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
journal, March 2002

Catalytic growth of carbon filaments
journal, January 1989

Mechanical properties of high-aspect-ratio atomic-force microscope tips
journal, June 2002

WS2 nanotubes as tips in scanning probe microscopy
journal, December 1999

Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors
journal, August 2001

Patterned growth of individual and multiple vertically aligned carbon nanofibers
journal, June 2000

Growth and fabrication with single-walled carbon nanotube probe microscopy tips
journal, May 2000

Microfabricated field emission devices using carbon nanofibers as cathode elements
journal, January 2001

Individually addressable vertically aligned carbon nanofiber-based electrochemical probes
journal, March 2002

Improved fabrication approach for carbon nanotube probe devices
journal, November 2000

Self-aligned gated field emission devices using single carbon nanofiber cathodes
journal, November 2002

Scanning probe tip geometry optimized for metrology by focused ion beam ion milling
journal, November 1991

Characterization of scanning probe microscope tips for linewidth measurement
journal, November 1991

Formation of probe microscope tips in silicon by focused ion beams
journal, January 1994

Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid
journal, June 1999