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Title: Sparse sampling and reconstruction for electron and scanning probe microscope imaging

Abstract

Systems and methods for conducting electron or scanning probe microscopy are provided herein. In a general embodiment, the systems and methods for conducting electron or scanning probe microscopy with an undersampled data set include: driving an electron beam or probe to scan across a sample and visit a subset of pixel locations of the sample that are randomly or pseudo-randomly designated; determining actual pixel locations on the sample that are visited by the electron beam or probe; and processing data collected by detectors from the visits of the electron beam or probe at the actual pixel locations and recovering a reconstructed image of the sample.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1202317
Patent Number(s):
9093249
Application Number:
14/482,754
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Sep 10
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS

Citation Formats

Anderson, Hyrum, Helms, Jovana, Wheeler, Jason W., Larson, Kurt W., and Rohrer, Brandon R. Sparse sampling and reconstruction for electron and scanning probe microscope imaging. United States: N. p., 2015. Web.
Anderson, Hyrum, Helms, Jovana, Wheeler, Jason W., Larson, Kurt W., & Rohrer, Brandon R. Sparse sampling and reconstruction for electron and scanning probe microscope imaging. United States.
Anderson, Hyrum, Helms, Jovana, Wheeler, Jason W., Larson, Kurt W., and Rohrer, Brandon R. Tue . "Sparse sampling and reconstruction for electron and scanning probe microscope imaging". United States. https://www.osti.gov/servlets/purl/1202317.
@article{osti_1202317,
title = {Sparse sampling and reconstruction for electron and scanning probe microscope imaging},
author = {Anderson, Hyrum and Helms, Jovana and Wheeler, Jason W. and Larson, Kurt W. and Rohrer, Brandon R.},
abstractNote = {Systems and methods for conducting electron or scanning probe microscopy are provided herein. In a general embodiment, the systems and methods for conducting electron or scanning probe microscopy with an undersampled data set include: driving an electron beam or probe to scan across a sample and visit a subset of pixel locations of the sample that are randomly or pseudo-randomly designated; determining actual pixel locations on the sample that are visited by the electron beam or probe; and processing data collected by detectors from the visits of the electron beam or probe at the actual pixel locations and recovering a reconstructed image of the sample.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {7}
}

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