Polished polymide substrate
Abstract
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
- Inventors:
- Issue Date:
- Research Org.:
- ~Individually Owned Patent
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174329
- Patent Number(s):
- 6563998
- Application Number:
- 09/292,432
- Assignee:
- Farah, John; Sudarshanam, Venkatapuram S.
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- FG02-90ER81033
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Farah, John, and Sudarshanam, Venkatapuram S. Polished polymide substrate. United States: N. p., 2003.
Web.
Farah, John, & Sudarshanam, Venkatapuram S. Polished polymide substrate. United States.
Farah, John, and Sudarshanam, Venkatapuram S. Tue .
"Polished polymide substrate". United States. https://www.osti.gov/servlets/purl/1174329.
@article{osti_1174329,
title = {Polished polymide substrate},
author = {Farah, John and Sudarshanam, Venkatapuram S.},
abstractNote = {Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 13 00:00:00 EDT 2003},
month = {Tue May 13 00:00:00 EDT 2003}
}
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