Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
Abstract
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174322
- Patent Number(s):
- 6,562,518
- Application Number:
- 09/818,490
- Assignee:
- Lockheed Martin Energy Research Corporation (Oak Ridge, TN) OSTI
- DOE Contract Number:
- AC05-96OR22464
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Bates, John B. Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. United States: N. p., 2003.
Web.
Bates, John B. Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. United States.
Bates, John B. Tue .
"Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing". United States. https://www.osti.gov/servlets/purl/1174322.
@article{osti_1174322,
title = {Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing},
author = {Bates, John B.},
abstractNote = {Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {5}
}
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