Method for making a micromachined microwave signal control device
Abstract
A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.
- Inventors:
-
- Mountain House, CA
- Issue Date:
- Research Org.:
- Sandia Corporation (Livermore, CA)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1015312
- Patent Number(s):
- 7886434
- Application Number:
- US Patent Application 12/136,890
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Forman, Michael A. Method for making a micromachined microwave signal control device. United States: N. p., 2011.
Web.
Forman, Michael A. Method for making a micromachined microwave signal control device. United States.
Forman, Michael A. Tue .
"Method for making a micromachined microwave signal control device". United States. https://www.osti.gov/servlets/purl/1015312.
@article{osti_1015312,
title = {Method for making a micromachined microwave signal control device},
author = {Forman, Michael A},
abstractNote = {A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 15 00:00:00 EST 2011},
month = {Tue Feb 15 00:00:00 EST 2011}
}