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Kinetic Monte Carlo for semiconductor surface science v.1

Software ·
DOI:https://doi.org/10.11578/dc.20220802.1· OSTI ID:code-78088 · Code ID:78088
 [1]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

SAND2020-14229 O This software builds on an open source Kinetic Monte Carlo library to evaluate the incorporation rate of semiconductor dopant atoms in an Atomic Precision Advanced Manufacturing (APAM) process. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525

Site Accession Number:
SCR #2587.0
Software Type:
Scientific
License(s):
GNU General Public License v3.0
Programming Language(s):
Python
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE

Primary Award/Contract Number:
NA0003525
DOE Contract Number:
NA0003525
Code ID:
78088
OSTI ID:
code-78088
Country of Origin:
United States

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