Abstract
SAND2020-14229 O This software builds on an open source Kinetic Monte Carlo library to evaluate the incorporation rate of semiconductor dopant atoms in an Atomic Precision Advanced Manufacturing (APAM) process. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525
- Developers:
-
Campbell, Quinn [1][2]
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Release Date:
- 2021-01-21
- Project Type:
- Open Source, Publicly Available Repository
- Software Type:
- Scientific
- Programming Languages:
-
Python
- Licenses:
-
GNU General Public License v3.0
- Sponsoring Org.:
-
USDOEPrimary Award/Contract Number:NA0003525
- Code ID:
- 78088
- Site Accession Number:
- SCR #2587.0
- Research Org.:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Country of Origin:
- United States
Citation Formats
Campbell, Quinn.
Kinetic Monte Carlo for semiconductor surface science v.1.
Computer Software.
https://github.com/sandialabs/apam-kmc.
USDOE.
21 Jan. 2021.
Web.
doi:10.11578/dc.20220802.1.
Campbell, Quinn.
(2021, January 21).
Kinetic Monte Carlo for semiconductor surface science v.1.
[Computer software].
https://github.com/sandialabs/apam-kmc.
https://doi.org/10.11578/dc.20220802.1.
Campbell, Quinn.
"Kinetic Monte Carlo for semiconductor surface science v.1." Computer software.
January 21, 2021.
https://github.com/sandialabs/apam-kmc.
https://doi.org/10.11578/dc.20220802.1.
@misc{
doecode_78088,
title = {Kinetic Monte Carlo for semiconductor surface science v.1},
author = {Campbell, Quinn},
abstractNote = {SAND2020-14229 O This software builds on an open source Kinetic Monte Carlo library to evaluate the incorporation rate of semiconductor dopant atoms in an Atomic Precision Advanced Manufacturing (APAM) process. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525},
doi = {10.11578/dc.20220802.1},
url = {https://doi.org/10.11578/dc.20220802.1},
howpublished = {[Computer Software] \url{https://doi.org/10.11578/dc.20220802.1}},
year = {2021},
month = {jan}
}