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U.S. Department of Energy
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Multi-frequency aluminum nitride micro-filters for advanced RF communications.

Conference ·
OSTI ID:991847
An AlN MEMS resonator technology has been developed, enabling massively parallel filter arrays on a single chip. Low-loss filter banks covering the 10 MHz--10-GHz frequency range have been demonstrated, as has monolithic integration with inductors and CMOS circuitry. The high level of integration enables miniature multi-bandm spectrally aware, and cognitive radios.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
991847
Report Number(s):
SAND2010-1982C
Country of Publication:
United States
Language:
English

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