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U.S. Department of Energy
Office of Scientific and Technical Information
 

Laser-induced damage of polycrystalline silicon optically powered MEMS actuators.

Conference ·
OSTI ID:988558
;

Abstract Not Provided

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
988558
Report Number(s):
SAND2005-1664C
Country of Publication:
United States
Language:
English

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