Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Laser-induced damage of polycrystalline silicon optically powered MEMS actuators.

Conference ·
OSTI ID:968390
;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
968390
Report Number(s):
SAND2005-4381C
Country of Publication:
United States
Language:
English

Similar Records

Laser-induced damage of polycrystalline silicon optically powered MEMS actuators.
Conference · Mon Feb 28 23:00:00 EST 2005 · OSTI ID:988558
Thermal phenomena in polycrystalline silicon MEMS during laser irradiation.
Conference · Tue Jun 01 00:00:00 EDT 2010 · OSTI ID:1020393
Optical testing of polycrystalline silicon flexure-type optical actuators.
Conference · Sun Oct 01 00:00:00 EDT 2006 · OSTI ID:1264624

Related Subjects

42 ENGINEERING
ACTUATORS
DAMAGE
LASER RADIATION
MICROELECTRONICS
RADIATION EFFECTS
SILICON