Method and apparatus for making diamond-like carbon films

Patent · Tue Dec 02 00:00:00 EST 2008

OSTI ID:985724

Pern, Fu-Jann ^[1]; Touryan, Kenell J ^[2]; Panosyan, Zhozef Retevos ^[3]; Gippius, Aleksey Alekseyevich ^[4]

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1. Golden, CO
2. Indian Hills, CO
3. Yerevan, AM
4. Moscow, RU

Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.

• Research Organization: Midwest Research Institute, Kansas City, MO (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC36-99GO10337
• Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)
• Patent Number(s): 7,459,188
• Application Number: 11/002,611
• OSTI ID: 985724
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY