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Title: Method and apparatus for making diamond-like carbon films

Abstract

Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.

Inventors:
 [1];  [2];  [3];  [4]
  1. Golden, CO
  2. Indian Hills, CO
  3. Yerevan, AM
  4. Moscow, RU
Publication Date:
Research Org.:
Midwest Research Institute, Kansas City, MO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
985724
Patent Number(s):
7,459,188
Application Number:
11/002,611
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-99GO10337
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY

Citation Formats

Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, and Gippius, Aleksey Alekseyevich. Method and apparatus for making diamond-like carbon films. United States: N. p., 2008. Web.
Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, & Gippius, Aleksey Alekseyevich. Method and apparatus for making diamond-like carbon films. United States.
Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, and Gippius, Aleksey Alekseyevich. 2008. "Method and apparatus for making diamond-like carbon films". United States. https://www.osti.gov/servlets/purl/985724.
@article{osti_985724,
title = {Method and apparatus for making diamond-like carbon films},
author = {Pern, Fu-Jann and Touryan, Kenell J and Panosyan, Zhozef Retevos and Gippius, Aleksey Alekseyevich},
abstractNote = {Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.},
doi = {},
url = {https://www.osti.gov/biblio/985724}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {12}
}