Characterizing the Two and Three DimensionalResolution of an Improved Aberration-corrected STEM

Journal Article · Thu Jan 01 04:00:00 EST 2009 · Microscopy and Microanalysis

DOI:https://doi.org/10.1017/S1431927609990389· OSTI ID:979167

Lupini, Andrew R ^[1]; Borisevich, Albina Y ^[1]; Idrobo Tapia, Juan C ^[1]; Christen, Hans M ^[1]; Biegalski, Michael D ^[1]; Pennycook, Stephen J ^[1]

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1. ORNL

The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from a specialist project, custom built at a small number of sites to a common instrument in many modern laboratories. Here we describe some initial results illustrating the two- and three- dimensional performance of an aberration corrected STEM with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We demonstrate a resolution of 0.63 and detection of single dopant atoms with three-dimensional sensitivity.

• Research Organization: Oak Ridge National Laboratory (ORNL)
• Sponsoring Organization: ORNL work for others; SC USDOE - Office of Science (SC)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 979167
• Journal Information: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 5 Vol. 15; ISSN MIMIF7; ISSN 1431-9276
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
ATOMS
CHROMATIC ABERRATIONS
CORRECTIONS
DETECTION
ELECTRON MICROSCOPES
PERFORMANCE
RESOLUTION
SCANNING ELECTRON MICROSCOPY
TRANSMISSION ELECTRON MICROSCOPY