A physically based model for dielectric charging in an integrated optical MEMS wavelength selective switch.
Conference
·
OSTI ID:967798
- Massachusetts Institute of Technology
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 967798
- Report Number(s):
- SAND2005-4591C
- Country of Publication:
- United States
- Language:
- English
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