Polysilicon MEMS opto-thermal actuator design and performance.
Conference
·
OSTI ID:965483
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 965483
- Report Number(s):
- SAND2004-5918C
- Resource Relation:
- Conference: Proposed for presentation at the Packaging of MEMS and Related Micro-Nano-Bio Integrated Systems Workshop held November 18-19, 2004 in Long Beach, CA.
- Country of Publication:
- United States
- Language:
- English
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