Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Stress gradients in electrodeposited Ni MEMS.

Conference ·
OSTI ID:957295
; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
957295
Report Number(s):
SAND2004-3006C
Country of Publication:
United States
Language:
English

Similar Records

Sources of stress gradients in electrodeposited Ni MEMS.
Conference · Tue Jun 01 00:00:00 EDT 2004 · OSTI ID:957236
Stress evolution during electrodeposition of Ni thin films.
Conference · Tue Jun 01 00:00:00 EDT 2004 · OSTI ID:957235
Fatugue-induced dynamic coarsening in ultra-fine grained electrodeposited Ni-Mn MEMS structures.
Conference · Fri Mar 31 23:00:00 EST 2006 · OSTI ID:897625

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
ELECTRODEPOSITION
MICROELECTRONIC CIRCUITS
NICKEL
STRESSES
THIN FILMS