Electron paramagnetic resonance study of hydrogen-incorporated ultrananocrystalline diamond thin films.

Journal Article · Mon Jan 01 04:00:00 EST 2007 · J. Appl. Phys.

DOI:https://doi.org/10.1063/1.2747593· OSTI ID:953809

Liu, C; Xiao, X; Wang, H -H; Auciello, O; Carlisle, J A

Hydrogen-incorporated ultrananocrystalline diamond (UNCD) thin films have been deposited in microwave plasma enhanced chemical vapor deposition (MPECVD) system with various hydrogen concentrations in the Ar/CH{sub 4} gas mixture, and characterized by several techniques including electron paramagnetic resonance (EPR), Raman spectroscopy, scanning electron microscope (SEM), and dc conductivity measurements. The EPR spectrum of diamond film was composed of two Lorentzian lines with different g factors. When hydrogen concentration in the plasma increased during diamond growth, the spin density of the narrow line decreased, whereas the spin density of the broad signal remained roughly constant. We propose that the two EPR components can be attributed to two different phases in the diamond film, i.e., the narrow line is originated from the highly defective grain boundary region and the broad line is related to the defects in the diamond grains.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 953809
• Report Number(s): ANL/MSD/JA-59225
• Journal Information: J. Appl. Phys., Journal Name: J. Appl. Phys. Journal Issue: 2007 Vol. 101; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

08 HYDROGEN
36 MATERIALS SCIENCE
CHEMICAL VAPOR DEPOSITION
DEFECTS
DENSITY
DIAMONDS
ELECTRON MICROSCOPES
ELECTRON SPIN RESONANCE
GROWTH
HYDROGEN
NANOSTRUCTURES
PLASMA
RAMAN SPECTROSCOPY
SIGNALS
SPIN
THIN FILMS