Layered (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films for high frequency tunable devices.
Journal Article
·
· Thin Solid Films
Low dielectric loss and high electrical breakdown fields, in conjunction with an application-specific permittivity response, are simultaneous requirements for (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films. This has proved problematic, in that synthesis conditions which tend to reduce dielectric loss also tend to reduce zero-bias permittivity and electric-field tunability of the permittivity, thereby necessitating undesired compromises in overall performance for some applications. In order to address this problem of simultaneous optimization, we fabricated BST thin films with very low dielectric loss, Ti-rich BST layers ((Ba+Sr)/Ti=0.73) at the electrode/BST interfaces, in series with a primary, high tunability, high permittivity BST layer ((Ba+Sr)/Ti=0.9) in the center of this layered BST structure. Planar capacitors fabricated from the BST films exhibit low dielectric loss (tan {delta}=0.005) simultaneously with high (76%) tunability at room temperature and high breakdown fields ({approx}4 MV/cm), compared with capacitors with a single BST layer (Ba+Sr/Ti=0.9). Post annealing of the layered BST films at 800 C further improved dielectric loss down to 0.003, while keeping the high tunability and high breakdown field of the as-deposited films.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- EE; DOD
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 949620
- Report Number(s):
- ANL/MSD/JA-42602
- Journal Information:
- Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: 1-2 ; Jun. 24, 2002 Vol. 413; ISSN THSFAP; ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- ENGLISH
Similar Records
Magnetron sputter-deposited multilayer (Ba{sub x}Sr{sub 1x})Ti{sub 1+y}O{sub 3+z} thin films for passive and active devices.
Composition-control of magnetron-sputter-deposited (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films for voltage tunable devices
Synthesis and characterization of (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films and integration into microwave varactors and phase shifters.
Journal Article
·
Sun Dec 31 23:00:00 EST 2000
· Integr. Ferroelectrics
·
OSTI ID:942903
Composition-control of magnetron-sputter-deposited (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films for voltage tunable devices
Journal Article
·
Sun Jan 30 23:00:00 EST 2000
· Applied Physics Letters
·
OSTI ID:20215173
Synthesis and characterization of (Ba{sub x}Sr{sub 1-x})Ti{sub 1+y}O{sub 3+z} thin films and integration into microwave varactors and phase shifters.
Journal Article
·
Sun Dec 31 23:00:00 EST 2000
· Integr. Ferroelectrics
·
OSTI ID:942902