Lead zirconate titanate thin films on base-metal foils : an apporach for embedded high-permittivity passive components.
An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb{sub 0.85}La{sub 0.15}-(Zr{sub 0.52}Ti{sub 0.48}){sub 0.96}O{sub 3}, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 {mu}m thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- DOD
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 949438
- Report Number(s):
- ANL/MSD/JA-40916
- Journal Information:
- J. Am. Ceram. Soc., Journal Name: J. Am. Ceram. Soc. Journal Issue: 10 ; Oct. 2001 Vol. 84
- Country of Publication:
- United States
- Language:
- ENGLISH
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