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Office of Scientific and Technical Information
 

Accelerating aging failures in MEMS devices.

Conference ·
OSTI ID:947804
; ; ; ; ; ; ; ;
No abstract prepared.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
947804
Report Number(s):
SAND2005-1866C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
AGING
MEASURING METHODS
MICROELECTRONIC CIRCUITS