Accelerated testing of sliding-contact MEMS devices.
Conference
·
OSTI ID:901722
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 901722
- Report Number(s):
- SAND2006-0845C; TRN: US200715%%41
- Resource Relation:
- Conference: Proposed for presentation at the Mechanical Reliability of Silicon MEMS held February 27-28, 2006 in Hale, Germany.
- Country of Publication:
- United States
- Language:
- English
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