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Title: Influence of Oxygen Deficiency on the Out-of-Plane Tilt of Epitaxial Y2O3 Films on Ni-5%W Tapes

Journal Article · · Journal of Materials Research

We analyzed the crystallographic c-axis tilt of (001) Y2O3 films grown on biaxially textured Ni-5%W tapes under different oxygen flux conditions. We found that different tilting mechanisms were effective in films with different oxygen stoichiometry. Moreover, the structure of the film/substrate interface, investigated by TEM, and the residual strain of the film, investigated by XRD, were also dependent on the film oxygen content. While the oxygen stoichiometric Y2O3 sample exhibited a coherent film/substrate interface and the sharpest out-of-plane texture, the films grown under reduced oxygen pressure exhibited a smaller overall c-axis tilt due to formation of interface dislocations and regions in which the film oxygen vacancies ordered to form a lattice superstructure.

Research Organization:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Shared Research Equipment Collaborative Research Center
Sponsoring Organization:
OE USDOE - Office of Electric Transmission and Distribution
DOE Contract Number:
DE-AC05-00OR22725
OSTI ID:
947585
Journal Information:
Journal of Materials Research, Vol. 24, Issue 2; ISSN 0884-2914
Country of Publication:
United States
Language:
English