Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing
We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under either point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 945794
- Report Number(s):
- LLNL-JRNL-403394; TRN: US200903%%796
- Journal Information:
- Sensors and Actuators A: Physical, vol. 147, no. 2, October 3, 2008, pp. 516-521, Vol. 147, Issue 2
- Country of Publication:
- United States
- Language:
- English
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