Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing
Abstract
We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under either point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 945794
- Report Number(s):
- LLNL-JRNL-403394
TRN: US200903%%796
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Journal Article
- Journal Name:
- Sensors and Actuators A: Physical, vol. 147, no. 2, October 3, 2008, pp. 516-521
- Additional Journal Information:
- Journal Volume: 147; Journal Issue: 2
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; 47 OTHER INSTRUMENTATION; ASPECT RATIO; MICROSCOPY; SENSITIVITY; SHAPE
Citation Formats
Loui, A, Goericke, F, Ratto, T, Lee, J, Hart, B, and King, W. Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing. United States: N. p., 2008.
Web.
Loui, A, Goericke, F, Ratto, T, Lee, J, Hart, B, & King, W. Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing. United States.
Loui, A, Goericke, F, Ratto, T, Lee, J, Hart, B, and King, W. 2008.
"Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing". United States. https://www.osti.gov/servlets/purl/945794.
@article{osti_945794,
title = {Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing},
author = {Loui, A and Goericke, F and Ratto, T and Lee, J and Hart, B and King, W},
abstractNote = {We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under either point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.},
doi = {},
url = {https://www.osti.gov/biblio/945794},
journal = {Sensors and Actuators A: Physical, vol. 147, no. 2, October 3, 2008, pp. 516-521},
number = 2,
volume = 147,
place = {United States},
year = {Fri Apr 25 00:00:00 EDT 2008},
month = {Fri Apr 25 00:00:00 EDT 2008}
}