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rf Magnetron Sputter Deposition of Transparent Conducting Nb-Doped TiO2 Films on SrTiO3

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.2434005· OSTI ID:944480
Abstract not provided
Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
OSTI ID:
944480
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 3, 2007 Vol. 101
Country of Publication:
United States
Language:
English

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