Micromachined microwave signal control device and method for making same
Patent
·
OSTI ID:943488
- San Francisco, CA
A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.
- Research Organization:
- Sandia National Laboratories (SNL-CA), Livermore, CA
- Sponsoring Organization:
- United States Department of Energy
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Number(s):
- 7,420,442
- Application Number:
- 11/149,400
- OSTI ID:
- 943488
- Country of Publication:
- United States
- Language:
- English
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