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Title: Micromachined microwave signal control device and method for making same

Abstract

A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.

Inventors:
 [1]
  1. San Francisco, CA
Publication Date:
Research Org.:
Sandia National Laboratories (SNL-CA), Livermore, CA
Sponsoring Org.:
USDOE
OSTI Identifier:
943488
Patent Number(s):
7,420,442
Application Number:
11/149,400
Assignee:
Sandia Corporation (Livermore, CA) ALO
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Forman, Michael A. Micromachined microwave signal control device and method for making same. United States: N. p., 2008. Web.
Forman, Michael A. Micromachined microwave signal control device and method for making same. United States.
Forman, Michael A. Tue . "Micromachined microwave signal control device and method for making same". United States. https://www.osti.gov/servlets/purl/943488.
@article{osti_943488,
title = {Micromachined microwave signal control device and method for making same},
author = {Forman, Michael A},
abstractNote = {A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 02 00:00:00 EDT 2008},
month = {Tue Sep 02 00:00:00 EDT 2008}
}

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