skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method for making a micromachined microwave signal control device

Abstract

A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.

Inventors:
 [1]
  1. Mountain House, CA
Publication Date:
Research Org.:
Sandia Corporation (Livermore, CA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1015312
Patent Number(s):
7,886,434
Application Number:
US Patent Application 12/136,890
Assignee:
Sandia Corporation (Livermore, CA) NNSASC
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Forman, Michael A. Method for making a micromachined microwave signal control device. United States: N. p., 2011. Web.
Forman, Michael A. Method for making a micromachined microwave signal control device. United States.
Forman, Michael A. Tue . "Method for making a micromachined microwave signal control device". United States. https://www.osti.gov/servlets/purl/1015312.
@article{osti_1015312,
title = {Method for making a micromachined microwave signal control device},
author = {Forman, Michael A},
abstractNote = {A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 15 00:00:00 EST 2011},
month = {Tue Feb 15 00:00:00 EST 2011}
}

Patent:

Save / Share: