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Thermodynamic stability of binary oxides in contact with silicon

Conference ·
OSTI ID:94073
;  [1]
  1. Pennsylvania State Univ., University Park, PA (United States). Dept. of Materials Science and Engineering

Using tabulated thermodynamic data, a comprehensive investigation of the thermodynamic stability of binary oxides in contact with silicon at 1,000 K was conducted. Reactions between silicon and each binary oxide at 1,000 K, including those involving ternary phases, were considered. Sufficient thermodynamic data exists to conclude that all binary oxides except the following are unstable in contract with silicon at 1,000 K: LiO{sub 2}, the alkaline earth oxides (BeO, MgO, CaO, SrO, and BaO), the column IIIB oxides (Sc{sub 2}O{sub 3}, Y{sub 2}O{sub 3}, and Re{sub 2}O{sub 3} where Re is a rare earth), ThO{sub 2}, ZrO{sub 2}, HfO{sub 2}, and Al{sub 2}O{sub 3}. Of these remaining oxides, sufficient thermodynamic data exists to conclude that MgO, CaO, and ZrO{sub 2} are thermodynamically stable in contact with silicon at 1,000 K.

OSTI ID:
94073
Report Number(s):
CONF-941144--; ISBN 1-55899-258-8
Country of Publication:
United States
Language:
English