Effect of xenon bombardment on ruthenium-coated grazing incidence collector mirror lifetime for EUV lithography.
No abstract prepared.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- SC; NIST
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 934891
- Report Number(s):
- ANL/MCS/JA-56132
- Journal Information:
- J. Appl. Phys., Journal Name: J. Appl. Phys. Journal Issue: 2006 Vol. 100; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- ENGLISH
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