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U.S. Department of Energy
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Direct synchrotron x-ray microdiffraction measurements of strain and bending in micromachined silicon devices.

Conference ·
OSTI ID:925188

No abstract prepared.

Research Organization:
Argonne National Laboratory (ANL)
Sponsoring Organization:
SC
DOE Contract Number:
AC02-06CH11357
OSTI ID:
925188
Report Number(s):
ANL/XFD/CP-114184
Country of Publication:
United States
Language:
ENGLISH

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