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Nitride mediated epitaxy of CoSi2 on Si(100)

Journal Article · · Applied Physics Letters
OSTI ID:917286

No abstract prepared.

Research Organization:
COLLABORATION - Natl. U. ofSingapore
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic EnergySciences. Materials Science and Engineering Division
DOE Contract Number:
AC02-05CH11231
OSTI ID:
917286
Report Number(s):
LBNL--51604; BnR: KC0201010
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 12 Vol. 82; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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