Waveguide device and method for making same
Patent
·
OSTI ID:912995
- San Francisco, CA
A monolithic micromachined waveguide device or devices with low-loss, high-power handling, and near-optical frequency ranges is set forth. The waveguide and integrated devices are capable of transmitting near-optical frequencies due to optical-quality sidewall roughness. The device or devices are fabricated in parallel, may be mass produced using a LIGA manufacturing process, and may include a passive component such as a diplexer and/or an active capping layer capable of particularized signal processing of the waveforms propagated by the waveguide.
- Research Organization:
- Sandia National Laboratories (SNL-CA), Livermore, CA
- Sponsoring Organization:
- United States Department of Energy
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia National Laboratories (Livermore, CA)
- Patent Number(s):
- 7,256,667
- Application Number:
- 11/149,404
- OSTI ID:
- 912995
- Country of Publication:
- United States
- Language:
- English
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