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Title: Method and apparatus for debris mitigation for an electrical discharge source

Abstract

Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

Inventors:
 [1];  [2];  [3]
  1. San Clemente, CA
  2. Albuquerque, NM
  3. Helena, CA
Publication Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
908608
Patent Number(s):
6,989,629
Assignee:
EUV LLC (Santa Clara, CA) ALO
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Klebanoff, Leonard E, Rader, Daniel J, and Silfvast, William T. Method and apparatus for debris mitigation for an electrical discharge source. United States: N. p., 2006. Web.
Klebanoff, Leonard E, Rader, Daniel J, & Silfvast, William T. Method and apparatus for debris mitigation for an electrical discharge source. United States.
Klebanoff, Leonard E, Rader, Daniel J, and Silfvast, William T. Tue . "Method and apparatus for debris mitigation for an electrical discharge source". United States. doi:. https://www.osti.gov/servlets/purl/908608.
@article{osti_908608,
title = {Method and apparatus for debris mitigation for an electrical discharge source},
author = {Klebanoff, Leonard E and Rader, Daniel J and Silfvast, William T},
abstractNote = {Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 24 00:00:00 EST 2006},
month = {Tue Jan 24 00:00:00 EST 2006}
}

Patent:

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