Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Electrode configuration for extreme-UV electrical discharge source

Patent ·
OSTI ID:874964
 [1];  [2];  [3]
  1. Pleasanton, CA
  2. Tracey, CA
  3. San Ramon, CA
+ Show Author Affiliations
It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the front electrode has an opening that is communication with the proximal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is substantially linear, and third region which is convex wherein the regions are viewed outwardly from the inner surface of the opening that is adjacent the proximal end of the capillary bore so that the first region is closest to the proximal end; and (d) a source of electric potential that is connected across the front and back electrodes.
Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
EUV LLC (Santa Clara, CA)
Patent Number(s):
US 6498832
OSTI ID:
874964
Country of Publication:
United States
Language:
English

References (7)

High-power extreme-ultraviolet source based on gas jets
  • Kubiak, Glenn D.; Bernardez II, Luis J.; Krenz, Kevin D.
  • 23rd Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.309560
conference June 1998
Intense plasma discharge source at 135 nm for extreme-ultraviolet lithography journal January 1997
Structure and low-temperature thermal conductivity of pyrolytic boron nitride journal August 1992
Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region journal January 1998
High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography conference June 1999
Advances in the reduction and compensation of film stress in high-reflectance multilayer coatings for extreme-ultraviolet lithography conference June 1998
Compression Annealing of Pyrolytic Boron Nitride journal March 1969

Similar Records

Capillary discharge source
Patent · Mon Nov 24 23:00:00 EST 2003 · OSTI ID:1174599
Micromanifold assembly
Patent · Tue Jun 30 00:00:00 EDT 2009 · OSTI ID:968973
Micromanifold assembly
Patent · Tue Apr 24 00:00:00 EDT 2012 · OSTI ID:1040620

Related Subjects

/378/250/372/
adjacent
bore
capillary
channel
circular
closest
communication
concave
configuration
connected
convex
debris
defined
defines
demonstrated
dependent
developed
discharge
discharge plasma
distal
electric
electric field
electrical
electrode
electrode configuration
electrodes
established
exhibits
extreme
extreme ultraviolet
extreme-uv
field
front
generating
generation
inner
linear
magnitude
minimize
non-uniform
outwardly
plasma
positioned
potential
profile
proximal
region
regions
results
shape
soft
source
sputtering
strength
substantially
surface
surfaces
third
ultraviolet
uniform
viewed
x-ray