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Vapor-phase lubrication of silicon surfaces, views form the nano- to the macroscopic.

Conference ·
OSTI ID:908377
 [1]; ;  [2]
  1. Penn State Univeristy
  2. Penn State University
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No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
908377
Report Number(s):
SAND2007-2783C
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
LUBRICATION
SILICON
VAPORS