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Office of Scientific and Technical Information
 

Mechanistic aspects of vapor phase lubrication of silicon.

Conference ·
OSTI ID:1028381
; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1028381
Report Number(s):
SAND2010-7362C
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
LUBRICATION
SANDIA NATIONAL LABORATORIES
SILICON