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U.S. Department of Energy
Office of Scientific and Technical Information

Compliant cantilevered micromold

Patent ·
OSTI ID:908276

A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.

Research Organization:
Sandia National Laboratories (SNL-CA), Livermore, CA
Sponsoring Organization:
United States Department of Energy
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia National Laboratories (Livermore, CA)
Patent Number(s):
7,090,189
Application Number:
10/222,763
OSTI ID:
908276
Country of Publication:
United States
Language:
English

References (4)

Various replication techniques for manufacturing three-dimensional metal microstructures journal December 1997
Molding of three dimensional microstructures by the LIGA process conference January 1992
Molding of LIGA microstructures from fluorinated polymers journal October 1996
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) journal May 1986