Compliant cantilevered micromold
- Pleasanton, CA
- Danville, CA
- Seattle, WA
- Livermore, CA
- Albuquerque, NM
A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.
- Research Organization:
- Sandia National Laboratories (SNL-CA), Livermore, CA
- Sponsoring Organization:
- United States Department of Energy
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia National Laboratories (Livermore, CA)
- Patent Number(s):
- 7,090,189
- Application Number:
- 10/222,763
- OSTI ID:
- 908276
- Country of Publication:
- United States
- Language:
- English
Various replication techniques for manufacturing three-dimensional metal microstructures
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journal | December 1997 |
Molding of three dimensional microstructures by the LIGA process
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conference | January 1992 |
Molding of LIGA microstructures from fluorinated polymers
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journal | October 1996 |
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
|
journal | May 1986 |
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