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Evaluation of cleaning methods for multilayer diffraction gratings

Conference · · Proceedings of SPIE - The International Society for Optical Engineering
DOI:https://doi.org/10.1117/12.694884· OSTI ID:900757
 [1];  [2];  [2];  [2];  [2];  [2];  [2];  [2];  [2]
  1. Univ. of Rochester, NY (United States); Laboratory for Laser Energetics, University of Rochester, Rochester, NY
  2. Univ. of Rochester, NY (United States)
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Multilayer dielectric (MLD) diffraction gratings are a crucial component for the OMEGA EP short-pulse, highenergy laser system. The MLD gratings must have both high-optical-diffraction efficiency and high laser-damage threshold to be suitable for use within the OMEGA EP Laser System. Considerable effort has been directed toward optimizing the process parameters required to fabricate gratings that can withstand the 2.6-kJ output energy delivered by each beam. In this paper, we discuss a number of conventional semiconductor chemical cleaning processes that have been investigated for grating cleaning, and present evidence of their effectiveness in the critical cleaning of MLD gratings fabricated at LLE. Diffraction efficiency and damage-threshold data were correlated with both scanning electron microscopy (SEM) and time-of-flight secondary ion-mass spectrometry (ToF-SIMS) to determine the best combination of cleaning process and chemistry. Finally, we found that using these cleaning processes we were able to exceed both the LLE diffraction efficiency (specification >97%) and laser-damage specifications (specification >2.7 J/cm2).

Research Organization:
Univ. of Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Organization:
USDOE
DOE Contract Number:
FC52-92SF19460
OSTI ID:
900757
Report Number(s):
DOE/SF--19460-729; 2006-157; 1691
Journal Information:
Proceedings of SPIE - The International Society for Optical Engineering, Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Vol. 6403; ISSN 0277-786X
Publisher:
SPIE
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
CHEMISTRY
CLEANING
Chemicals
Chemistry
DIELECTRIC MATERIALS
DIFFRACTION
DIFFRACTION GRATINGS
Diffraction
Diffraction gratings
EFFICIENCY
EVALUATION
LASERS
Laser induced damage
Lasers
Multilayers
SCANNING ELECTRON MICROSCOPY
SPECIFICATIONS
SPECTROSCOPY
Scanning electron microscopy
Semiconductors
Spectroscopy